Let's take some ET parameters measured on an ET site, and select one die from the area around this ET site. The selected product die shares the value of the ET parameter. For the selected die you also have the SORT results - that is, you know if the selected die "good" or "bad". The value of the ET parameter is marked "good" or "bad" respectively. A "good" population includes all values of the ET parameter that were marked as "good". A "bad" population includes all values of the ET parameter that were marked as "bad". If you repeat this procedure for each wafer taken from historical data, you can display the results in a table.
|
| Wafer |
Die | ET par. |
SORT |
| 1 |
11,12 |
0.68 |
good |
| 1 |
11,13 |
0.68 |
bad |
| 1 |
11,14 |
0.68 |
good |
 |
|
|
|
| 12 |
11,12 |
0.72 |
good |
| 12 |
11,13 |
0.72 |
good |
|
|
|
|
| 24 |
11,12 |
0.70 |
bad |
| 24 |
11,13 |
0.70 |
good |
| 24 |
11,14 |
0.70 |
good |
|
